JPS6244355U - - Google Patents
Info
- Publication number
- JPS6244355U JPS6244355U JP13293185U JP13293185U JPS6244355U JP S6244355 U JPS6244355 U JP S6244355U JP 13293185 U JP13293185 U JP 13293185U JP 13293185 U JP13293185 U JP 13293185U JP S6244355 U JPS6244355 U JP S6244355U
- Authority
- JP
- Japan
- Prior art keywords
- convex portions
- substrate
- concave
- light
- recognition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13293185U JPH0138698Y2 (en]) | 1985-08-30 | 1985-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13293185U JPH0138698Y2 (en]) | 1985-08-30 | 1985-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244355U true JPS6244355U (en]) | 1987-03-17 |
| JPH0138698Y2 JPH0138698Y2 (en]) | 1989-11-20 |
Family
ID=31032776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13293185U Expired JPH0138698Y2 (en]) | 1985-08-30 | 1985-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0138698Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010107613A (ja) * | 2008-10-29 | 2010-05-13 | Tosoh Corp | フォトマスク用基板およびその製造方法 |
-
1985
- 1985-08-30 JP JP13293185U patent/JPH0138698Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010107613A (ja) * | 2008-10-29 | 2010-05-13 | Tosoh Corp | フォトマスク用基板およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0138698Y2 (en]) | 1989-11-20 |